Nano calibration for stylus-based surface measurement

Abstract. The measurement of very small surface features is commonly and most conveniently undertaken by using stylus instruments. The authors bring together various strands of work relevant to their continued use and development. The limits of their performance are investigated and methods are described for calibrating them. The trend in 'nanotechnology' towards the direct exploitation of material properties at the atomic level is illustrated. It is demonstrated that controlled calibration of surface height into the sub-nanometre region can be achieved and that new techniques are rapidly improving the ability to measure surface angle

Thermal decomposition of CF3I using I-atom absorption

S.S. Kumaran, M.-C. Su1, K.P. Lim and J.V. Michael
Chemistry Division, Argonne National Laboratory, Argonne, IL, 60439, US
Received 25 May 1995; accepted 8 June 1995. Available online 20 January 2000.



I-atom atomic resonance absorption spectrometry (ARAS) has been developed and applied to measure the thermal decomposition rate constant for CF3I (+M) → CF3 + I (+M). The I-atom curve-of-growth (λ = 183 nm) was determined using this reaction, and, for [I] 3 × 1012 molecules cm−3, (ABS) = 1.9215 × 10−13 [I], yielding σ = 1.933 × 10−14 cm2. Measured rate constants can be expressed by k1 = 3.24 × 10−9 exp(−17286 K/T) cm3 molecule−1 s−1 (±56%, 1033 T 1285 K). RRKM theory has been applied to rationalize this result.


1 On sabbatical leave from Butler University, Indianapolis, IN 46208, USA.


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